JPH0328029Y2 - - Google Patents

Info

Publication number
JPH0328029Y2
JPH0328029Y2 JP1985081487U JP8148785U JPH0328029Y2 JP H0328029 Y2 JPH0328029 Y2 JP H0328029Y2 JP 1985081487 U JP1985081487 U JP 1985081487U JP 8148785 U JP8148785 U JP 8148785U JP H0328029 Y2 JPH0328029 Y2 JP H0328029Y2
Authority
JP
Japan
Prior art keywords
wafer
suction
conical member
reference bar
cap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985081487U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61197035U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985081487U priority Critical patent/JPH0328029Y2/ja
Publication of JPS61197035U publication Critical patent/JPS61197035U/ja
Application granted granted Critical
Publication of JPH0328029Y2 publication Critical patent/JPH0328029Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
JP1985081487U 1985-05-30 1985-05-30 Expired JPH0328029Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985081487U JPH0328029Y2 (en]) 1985-05-30 1985-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985081487U JPH0328029Y2 (en]) 1985-05-30 1985-05-30

Publications (2)

Publication Number Publication Date
JPS61197035U JPS61197035U (en]) 1986-12-09
JPH0328029Y2 true JPH0328029Y2 (en]) 1991-06-17

Family

ID=30628314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985081487U Expired JPH0328029Y2 (en]) 1985-05-30 1985-05-30

Country Status (1)

Country Link
JP (1) JPH0328029Y2 (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03117584U (en]) * 1990-03-16 1991-12-04
JP2014227260A (ja) * 2013-05-22 2014-12-08 株式会社ハーモテック 搬送装置
JP2018122381A (ja) * 2017-01-31 2018-08-09 ブラザー工業株式会社 部品保持装置
JP7576473B2 (ja) * 2021-01-22 2024-10-31 株式会社コガネイ 非接触搬送装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60124836A (ja) * 1983-12-09 1985-07-03 Nec Corp 半導体集積回路装置の製造装置
JPS61254437A (ja) * 1985-04-27 1986-11-12 Fujitsu Ltd ウエハ−チヤツク

Also Published As

Publication number Publication date
JPS61197035U (en]) 1986-12-09

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